By Hirotsugu Yasuda
Yasuda (chemical engineering, collage of Missouri-Columbia) presents in-depth insurance of the applied sciences and numerous techniques in luminous chemical vapor deposition (LCVD) and showcases the advance and use of LCVD approaches in commercial scale functions. The publication presents huge assurance of the relationships all for the interface among gas/solid, liquid/solid, and solid/solid which are used in low-pressure plasma interface engineering, with awareness interested by plasma polymerization. insurance progresses from basics of LCVD via operation of LCVD and LCVT, surfaces and interfaces, and interface engineering.
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Extra resources for Luminous Chemical Vapor Deposition and Interface Engineering
In conventional free radical polymerization, the initiation, propagation, and termination are kinetically coupled. Consequently, the increase of initiation rate increases the overall polymerization rate but reduces the degree of polymerization. In contrast to this situation (kinetically coupled initiation, propagation, and termination), the formation of chemically reactive species is not the initiation of a subsequent polymerization. Under such an activation/deactivation decoupled reaction system, the mechanism for how chemically reactive species are created and how these species react to form solid material deposition cannot be viewed in analogy to polymerization.
These two types of polymerization have distinctively diﬀerent deposition kinetics (see Chapter 8), which is helpful in elucidating how reactive species are created in an LCVD environment. The cathodic polymerization was found to be pressure dependent (with a ﬁxed ﬂow rate) and independent of the ﬂow rate, whereas the negative glow polymerization is pressure independent (at a ﬁxed ﬂow rate) but ﬂow rate dependent (at a ﬁxed pressure). The cathodic polymerization yields a much tighter network, manifested by high refractive indices, than the product of the negative glow polymerization.
The details of LPCAT are given in Chapter 16. , the luminous gas jet created by LPCAT is not in the state of plasma. In this book, the luminous gas phase is emphasized without being bound by the concept or deﬁnition of plasma. REFERENCES 1. 2. 3. Francis, G. The glow discharge at low pressure. In Handbuch der Physik; Flu¨gge, S. ; Springer-Verlag: Berlin, Germany, 1956; Vol. 22, No. 2, 53–208. M. ; Pergamon Press: New York, 1976; 84–91. Hatta, Y. Gas discharge. ; Tohoku University Lecture Series; Kindai Kagaku-Sha: Tokyo, 1979; Vol.